Technologies enabling 3D stacking of MEMS

Taklo, Maaike Margrete Visser; Mielnik, Michal Marek; Schjølberg-Henriksen, Kari; Storås, Preben; Tofteberg, Hannah Rosquist; Lietaer, Nicolas; Johannessen, Rolf
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http://hdl.handle.net/11250/2430610
Date
2010
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Smart Systems Integration and ReliabilityHonory volume on occasion ofHerbert Reichl's 65th birthday