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Technologies enabling 3D stacking of MEMS

dc.contributor.authorTaklo, Maaike Margrete Visser
dc.contributor.authorMielnik, Michal Marek
dc.contributor.authorSchjølberg-Henriksen, Kari
dc.contributor.authorStorås, Preben
dc.contributor.authorTofteberg, Hannah Rosquist
dc.contributor.authorLietaer, Nicolas
dc.contributor.authorJohannessen, Rolf
dc.date.accessioned2017-02-13T13:31:09Z
dc.date.available2017-02-13T13:31:09Z
dc.date.created2012-05-02T13:32:53Z
dc.date.issued2010
dc.identifier.citationSmart Systems Integration and ReliabilityHonory volume on occasion ofHerbert Reichl's 65th birthdaynb_NO
dc.identifier.isbn978-3-932434-77-8
dc.identifier.urihttp://hdl.handle.net/11250/2430610
dc.language.isoengnb_NO
dc.relation.ispartofSmart Systems Integration and ReliabilityHonory volume on occasion ofHerbert Reichl's 65th birthday
dc.titleTechnologies enabling 3D stacking of MEMSnb_NO
dc.typeChapternb_NO
dc.source.pagenumber136-145nb_NO
dc.identifier.cristin922528
cristin.unitcode7401,90,31,0
cristin.unitcode7401,90,32,0
cristin.unitnameMikrosystemer og nanoteknologi
cristin.unitnameInstrumentering
cristin.ispublishedtrue
cristin.fulltextpostprint


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