3D interconnect technologies for advanced MEMS/NEMS applications
dc.contributor.author | Lietaer, Nicolas | |
dc.contributor.author | Taklo, Maaike Margrete Visser | |
dc.contributor.author | Schjølberg-Henriksen, Kari | |
dc.contributor.author | Ramm, Peter | |
dc.date.accessioned | 2017-02-08T10:31:50Z | |
dc.date.available | 2017-02-08T10:31:50Z | |
dc.date.created | 2013-04-17T11:57:24Z | |
dc.date.issued | 2009 | |
dc.identifier.uri | http://hdl.handle.net/11250/2429927 | |
dc.language.iso | eng | nb_NO |
dc.title | 3D interconnect technologies for advanced MEMS/NEMS applications | nb_NO |
dc.type | Lecture | nb_NO |
dc.identifier.cristin | 1024280 | |
cristin.unitcode | 7401,90,31,0 | |
cristin.unitname | Mikrosystemer og nanoteknologi | |
cristin.ispublished | true | |
cristin.fulltext | original |
Tilhørende fil(er)
Denne innførselen finnes i følgende samling(er)
-
Publikasjoner fra CRIStin - SINTEF AS [5645]
-
SINTEF Digital [2381]