3D interconnect technologies for advanced MEMS/NEMS applications

dc.contributor.author	Lietaer, Nicolas
dc.contributor.author	Taklo, Maaike Margrete Visser
dc.contributor.author	Schjølberg-Henriksen, Kari
dc.contributor.author	Ramm, Peter
dc.date.accessioned	2017-02-08T10:31:50Z
dc.date.available	2017-02-08T10:31:50Z
dc.date.created	2013-04-17T11:57:24Z
dc.date.issued	2009
dc.identifier.uri	http://hdl.handle.net/11250/2429927
dc.language.iso	eng	nb_NO
dc.title	3D interconnect technologies for advanced MEMS/NEMS applications	nb_NO
dc.type	Lecture	nb_NO
dc.identifier.cristin	1024280
cristin.unitcode	7401,90,31,0
cristin.unitname	Mikrosystemer og nanoteknologi
cristin.ispublished	true
cristin.fulltext	original