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dc.contributor.authorPoppe, Erik
dc.contributor.authorØstbø, Niels Peter
dc.contributor.authorTyholdt, Frode
dc.date.accessioned2017-02-13T11:01:58Z
dc.date.available2017-02-13T11:01:58Z
dc.date.created2015-09-24T21:33:54Z
dc.date.issued2007
dc.identifier.citationInternational Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007, Lyon 10-14 June, 2007nb_NO
dc.identifier.isbn1424408423
dc.identifier.urihttp://hdl.handle.net/11250/2430452
dc.description.abstractAn industrializable process for manufacturing of piezoelectric ultrasound transducer elements is demonstrated. The PZT film is deposited by chemical solution deposition on SOI wafers, and standard MEMS processes are utilized to make cantilevers, bridges and membranes. The PZT film of ~50% of the devices exposed to thermal aging were found to fail at 85°C – 85%RH (relative humidity), while a real-life test of 8·1010 cycles at resonance only gives a slight change in Q-value and resonance frequency.
dc.description.abstractQualification and applications of a piezoelectric MEMS process
dc.language.isoengnb_NO
dc.relation.ispartofInternational Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007, Lyon 10-14 June, 2007
dc.titleQualification and applications of a piezoelectric MEMS processnb_NO
dc.typeChapternb_NO
dc.source.pagenumber529-532nb_NO
dc.identifier.cristin1273829
cristin.unitcode7401,90,31,0
cristin.unitcode7401,80,6,0
cristin.unitnameMikrosystemer og nanoteknologi
cristin.unitnameMaterialer og nanoteknologi
cristin.ispublishedtrue
cristin.fulltextpostprint
cristin.qualitycode1


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