A Clover shaped silicon piezoresistive microphone for miniaturized photoacoustic gas sensors
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http://hdl.handle.net/11250/2429946Issue date
2009Metadata
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Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS, 2009. DTIP MEMS/MOEMS '09Abstract
Here we present the design and modeling of a novel piezoresistive microphone designed for a photoacoustic gas sensor system. The microphone is fabricated using a novel process to enable DRIE etch through of membranes of multiple thickness. A Clover shaped silicon piezoresistive microphone for miniaturized photoacoustic gas sensors