A Clover shaped silicon piezoresistive microphone for miniaturized photoacoustic gas sensors

Grinde, Christopher; Øhlckers, Per; Mielnik, M.; Jensen, Geir Uri; Wang, DT
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http://hdl.handle.net/11250/2429946
Date
2009
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Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS, 2009. DTIP MEMS/MOEMS '09  
Abstract
Here we present the design and modeling of a novel piezoresistive microphone designed for a photoacoustic gas sensor system. The microphone is fabricated using a novel process to enable DRIE etch through of membranes of multiple thickness.
 
A Clover shaped silicon piezoresistive microphone for miniaturized photoacoustic gas sensors