dc.contributor.author | Dirdal, Christopher Andrew | |
dc.contributor.author | Thrane, Paul Conrad Vaagen | |
dc.contributor.author | Dullo, Firehun Tsige | |
dc.contributor.author | Gjessing, Jo | |
dc.contributor.author | Summanwar, Anand | |
dc.contributor.author | Tschudi, Jon | |
dc.date.accessioned | 2022-09-19T14:17:11Z | |
dc.date.available | 2022-09-19T14:17:11Z | |
dc.date.created | 2022-05-23T13:56:58Z | |
dc.date.issued | 2022 | |
dc.identifier.citation | Optics Letters. 2022, 47 (5), 1049-1052. | en_US |
dc.identifier.issn | 0146-9592 | |
dc.identifier.uri | https://hdl.handle.net/11250/3018984 | |
dc.description.abstract | Tunable focusing is a desired property in a wide range of optical imaging and sensing technologies but has tended to require bulky components that cannot be integrated on-chip and have slow actuation speeds. Recently, integration of metasurfaces into electrostatic micro-electromechanical system (MEMS) architectures has shown potential to overcome these challenges but has offered limited out-of-plane displacement range while requiring large voltages. We demonstrate for the first time, to the best of our knowledge, a movable metasurface lens actuated by integrated thin-film PZT MEMS, which has the advantage of offering large displacements at low voltages. An out-of-plane displacement of a metasurface in the range of 7.2 µm is demonstrated under a voltage application of 23 V. This is roughly twice the displacement at a quarter of the voltage of state of the art electrostatic out-of-plane actuation of metasurfaces. Using this tunability, we demonstrate a varifocal lens doublet with a focal shift of the order of 250 µm at the wavelength 1.55 μm. The thin-film PZT MEMS-metasurface is a promising platform for miniaturized varifocal components. | en_US |
dc.language.iso | eng | en_US |
dc.publisher | Optica | en_US |
dc.rights | Navngivelse-Ikkekommersiell 4.0 Internasjonal | * |
dc.rights.uri | http://creativecommons.org/licenses/by-nc/4.0/deed.no | * |
dc.title | MEMS-tunable dielectric metasurface lens using thin-film PZT for large displacements at low voltages | en_US |
dc.title.alternative | MEMS-tunable dielectric metasurface lens using thin-film PZT for large displacements at low voltages | en_US |
dc.type | Peer reviewed | en_US |
dc.type | Journal article | en_US |
dc.description.version | publishedVersion | en_US |
dc.rights.holder | © 2022 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement. | en_US |
dc.source.pagenumber | 1049-1052 | en_US |
dc.source.volume | 47 | en_US |
dc.source.journal | Optics Letters | en_US |
dc.source.issue | 5 | en_US |
dc.identifier.doi | 10.1364/OL.451750 | |
dc.identifier.cristin | 2026573 | |
cristin.ispublished | true | |
cristin.fulltext | original | |
cristin.qualitycode | 2 | |