| dc.contributor.author | Poppe, Erik Utne | |
| dc.contributor.author | Jensen, Geir Uri | |
| dc.contributor.author | Moe, Sigurd T. | |
| dc.contributor.author | Wang, Dag Thorstein | |
| dc.date.accessioned | 2018-01-31T07:58:19Z | |
| dc.date.available | 2018-01-31T07:58:19Z | |
| dc.date.created | 2016-11-30T10:19:19Z | |
| dc.date.issued | 2016 | |
| dc.identifier.citation | ECS Transactions. 2016, 75 (9), 311-319. | nb_NO |
| dc.identifier.issn | 1938-5862 | |
| dc.identifier.uri | http://hdl.handle.net/11250/2480825 | |
| dc.description.abstract | The effect of bond anneal in Si-Si direct bonding of laminates With thin membranes suspending closed cavities is studied. For membranes of a certain size and thickness, it is found that the under-pressure in the cavity during bond anneal leads to plastic deformation of the membrane. By controlling the cavity pressure it is found that the Si crystal of the membrane can be kept intact during bond anneal. | nb_NO |
| dc.language.iso | eng | nb_NO |
| dc.title | Plastic Deformation of Thin Si Membranes in Si-Si Direct Bonding | nb_NO |
| dc.type | Journal article | nb_NO |
| dc.type | Peer reviewed | nb_NO |
| dc.description.version | acceptedVersion | nb_NO |
| dc.source.pagenumber | 311-319 | nb_NO |
| dc.source.volume | 75 | nb_NO |
| dc.source.journal | ECS Transactions | nb_NO |
| dc.source.issue | 9 | nb_NO |
| dc.identifier.doi | 10.1149/07509.0311ecst | |
| dc.identifier.cristin | 1406279 | |
| dc.relation.project | Norges forskningsråd: 247781 | nb_NO |
| cristin.unitcode | 7401,90,31,0 | |
| cristin.unitname | Mikrosystemer og nanoteknologi | |
| cristin.ispublished | true | |
| cristin.fulltext | postprint | |
| cristin.qualitycode | 1 | |
