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dc.contributor.authorSagberg, Håkon
dc.contributor.authorBakke, Thor
dc.contributor.authorJohansen, Ib-Rune
dc.contributor.authorLacolle, Matthieu Jean P
dc.contributor.authorMoe, Sigurd T.
dc.date.accessioned2017-02-22T12:22:12Z
dc.date.available2017-02-22T12:22:12Z
dc.date.created2015-09-24T21:32:53Z
dc.date.issued2007
dc.identifier.citation2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, Hualien, Taiwan Aug 12-16, 2007nb_NO
dc.identifier.isbn9781424406418
dc.identifier.urihttp://hdl.handle.net/11250/2431741
dc.description.abstractWe have designed a robust two-state filter for infrared gas measurement, where the filter transmittance alternates between a single bandpass function, and a double-band offset reference. The device consists of fixed and movable diffractive sub-elements, micromachined in the device layer of a bonded silicon on insulator (BSOI) wafer. Switching between the two states of the filter is obtained by actuation of the movable sub- elements between idle and pull-in positions, which affects the interference of reflected light The characteristics of the filter are defined by a diffractive microrelief pattern etched on top of the sub-elements and by the position of the movable sub-elements at pull-in, the latter mechanically defined by the buried oxide layer. Thus, no accurate electrical control is needed to operate the filter. The first test components operate at 2 mum wavelength using a displacement of 500 nm and an actuation voltage of 5 V. No sticking or change in filter characteristics have been observed after repeated pull-in operations. The simplicity of fabrication and operation is likely to make the two-state filter an attractive component for sensors such as non-dispersive infrared gas detector.
dc.description.abstractTwo-state Optical Filter Based on Micromechanical Diffractive Elements
dc.language.isoengnb_NO
dc.relation.ispartof2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, Hualien, Taiwan Aug 12-16, 2007
dc.titleTwo-state Optical Filter Based on Micromechanical Diffractive Elementsnb_NO
dc.typeChapternb_NO
dc.source.pagenumber167-168nb_NO
dc.identifier.cristin1273807
cristin.unitcode7401,90,31,0
cristin.unitnameMikrosystemer og nanoteknologi
cristin.ispublishedtrue
cristin.fulltextpostprint
cristin.qualitycode1


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