dc.contributor.author | Sagberg, Håkon | |
dc.contributor.author | Bakke, Thor | |
dc.contributor.author | Johansen, Ib-Rune | |
dc.contributor.author | Lacolle, Matthieu Jean P | |
dc.contributor.author | Moe, Sigurd T. | |
dc.date.accessioned | 2017-02-22T12:22:12Z | |
dc.date.available | 2017-02-22T12:22:12Z | |
dc.date.created | 2015-09-24T21:32:53Z | |
dc.date.issued | 2007 | |
dc.identifier.citation | 2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, Hualien, Taiwan Aug 12-16, 2007 | nb_NO |
dc.identifier.isbn | 9781424406418 | |
dc.identifier.uri | http://hdl.handle.net/11250/2431741 | |
dc.description.abstract | We have designed a robust two-state filter for infrared gas measurement, where the filter transmittance alternates between a single bandpass function, and a double-band offset reference. The device consists of fixed and movable diffractive sub-elements, micromachined in the device layer of a bonded silicon on insulator (BSOI) wafer. Switching between the two states of the filter is obtained by actuation of the movable sub- elements between idle and pull-in positions, which affects the interference of reflected light The characteristics of the filter are defined by a diffractive microrelief pattern etched on top of the sub-elements and by the position of the movable sub-elements at pull-in, the latter mechanically defined by the buried oxide layer. Thus, no accurate electrical control is needed to operate the filter. The first test components operate at 2 mum wavelength using a displacement of 500 nm and an actuation voltage of 5 V. No sticking or change in filter characteristics have been observed after repeated pull-in operations. The simplicity of fabrication and operation is likely to make the two-state filter an attractive component for sensors such as non-dispersive infrared gas detector. | |
dc.description.abstract | Two-state Optical Filter Based on Micromechanical Diffractive Elements | |
dc.language.iso | eng | nb_NO |
dc.relation.ispartof | 2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, Hualien, Taiwan Aug 12-16, 2007 | |
dc.title | Two-state Optical Filter Based on Micromechanical Diffractive Elements | nb_NO |
dc.type | Chapter | nb_NO |
dc.source.pagenumber | 167-168 | nb_NO |
dc.identifier.cristin | 1273807 | |
cristin.unitcode | 7401,90,31,0 | |
cristin.unitname | Mikrosystemer og nanoteknologi | |
cristin.ispublished | true | |
cristin.fulltext | postprint | |
cristin.qualitycode | 1 | |