Cost-effective processing of a piezoresistive MEMS cantilever sensor
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Original versionMME 2011: Proceedings of the 22nd Micromechanics and microsystems technology Europe workshop: 19-22 June 2011 Tønsberg, Norway
In this paper cost-effective methods for fabrication of a piezoresistive cantilever sensor for industrial use are focused. The intended use of the presented cantilever is a medical application. A closer description of the cantilever design is given. The low-cost processing sequence is presented and each processing step is explained in detail. Results from electrical probing and mechanical strength test are given. The results demonstrate that the chosen low-cost processing route results in high yield and a mechanical robust device.