| dc.contributor.author | Haugholt, Karl Henrik | |
| dc.date.accessioned | 2017-02-09T14:04:10Z | |
| dc.date.available | 2017-02-09T14:04:10Z | |
| dc.date.created | 2015-09-24T20:06:03Z | |
| dc.date.issued | 2009 | |
| dc.identifier.citation | Photonics Letters of Poland. 2009, 1 (2), 58-60. | nb_NO |
| dc.identifier.issn | 2080-2242 | |
| dc.identifier.uri | http://hdl.handle.net/11250/2430158 | |
| dc.description.abstract | The paper presents the optical, mechanical, and electro-optical design of an interferometric inspection system for massive parallel inspection of Micro(Opto)ElectroMechanicalSystems (M(O)EMS). The basic idea is to adapt a micro-optical probing wafer to the M(O)EMS wafer under test. The probing wafer is exchangeable and contains a micro-optical interferometer array. Two preliminary interferometer designs are presented: a low coherent interferometer array based on the Mirau configuration and a laser interferometer array based on the Twyman-Green configuration. The optical design focuses on the illumination and imaging concept for the interferometer array. The mechanical design concentrates on a scanning system and integration in a standard test station for micro-fabrication. The smart-pixel approach for massive parallel electro-optical detection and data reduction is discussed. | |
| dc.description.abstract | An interferometric test station for massive parallel inspection of MEMS and MOEMS | |
| dc.language.iso | eng | nb_NO |
| dc.title | An interferometric test station for massive parallel inspection of MEMS and MOEMS | nb_NO |
| dc.type | Journal article | nb_NO |
| dc.type | Peer reviewed | nb_NO |
| dc.source.pagenumber | 58-60 | nb_NO |
| dc.source.volume | 1 | nb_NO |
| dc.source.journal | Photonics Letters of Poland | nb_NO |
| dc.source.issue | 2 | nb_NO |
| dc.identifier.cristin | 1271794 | |
| cristin.unitcode | 7401,90,41,0 | |
| cristin.unitname | Optiske målesystemer og dataanalyse | |
| cristin.ispublished | true | |
| cristin.fulltext | postprint | |
| cristin.qualitycode | 1 | |
