3D Detector Activities at SINTEF MiNaLab – Wafer Bonding, and Deep Reactive Ion Etching

dc.contributor.author	Kok, Angela
dc.date.accessioned	2017-02-08T12:28:51Z
dc.date.available	2017-02-08T12:28:51Z
dc.date.created	2015-09-24T21:59:04Z
dc.date.issued	2008
dc.identifier.uri	http://hdl.handle.net/11250/2429994
dc.language.iso	eng	nb_NO
dc.title	3D Detector Activities at SINTEF MiNaLab – Wafer Bonding, and Deep Reactive Ion Etching	nb_NO
dc.type	Lecture	nb_NO
dc.identifier.cristin	1274405
cristin.unitcode	7401,90,31,0
cristin.unitname	Mikrosystemer og nanoteknologi
cristin.ispublished	true
cristin.fulltext	postprint