3D stacked MEMS and ICs in a miniaturized sensor node

dc.contributor.author	Lietaer, Nicolas
dc.date.accessioned	2017-02-08T11:01:04Z
dc.date.available	2017-02-08T11:01:04Z
dc.date.created	2015-09-24T20:01:17Z
dc.date.issued	2009
dc.identifier.uri	http://hdl.handle.net/11250/2429947
dc.description.abstract	Solutions for through silicon viasSolutions for interconnectsDemonstrator for e-CUBES
dc.description.abstract	3D stacked MEMS and ICs in a miniaturized sensor node
dc.language.iso	eng	nb_NO
dc.title	3D stacked MEMS and ICs in a miniaturized sensor node	nb_NO
dc.type	Lecture	nb_NO
dc.identifier.cristin	1271682
cristin.unitcode	7401,90,31,0
cristin.unitname	Mikrosystemer og nanoteknologi
cristin.ispublished	true
cristin.fulltext	original