Metallization scheme and release methods for fabrication of RF MEMS switches

dc.contributor.author	Saha, Shimul Chandra
dc.contributor.author	Sæther, Trond
dc.contributor.author	Jensen, Geir uri
dc.contributor.author	Poppe, Erik
dc.contributor.author	Sagberg, Håkon
dc.date.accessioned	2017-02-08T10:25:01Z
dc.date.available	2017-02-08T10:25:01Z
dc.date.created	2008-01-14T14:59:28Z
dc.date.issued	2007
dc.identifier.isbn	9-999-99999-9
dc.identifier.uri	http://hdl.handle.net/11250/2429920
dc.language.iso	eng	nb_NO
dc.relation.ispartof	Proceedings of the 33rd Micro- and Nano- Engineering conference (MNE 2007)
dc.title	Metallization scheme and release methods for fabrication of RF MEMS switches	nb_NO
dc.type	Chapter	nb_NO
dc.source.pagenumber	773-774	nb_NO
dc.identifier.cristin	50781
cristin.unitcode	7401,0,0,0
cristin.unitname	Stiftelsen SINTEF
cristin.ispublished	true
cristin.fulltext	original