Blar i Publikasjoner fra CRIStin - SINTEF AS på forfatter "Øhlckers, Per"
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A Clover shaped silicon piezoresistive microphone for miniaturized photoacoustic gas sensors
Grinde, Christopher; Øhlckers, Per; Mielnik, M.; Jensen, Geir Uri; Wang, DT (Chapter, 2009)Here we present the design and modeling of a novel piezoresistive microphone designed for a photoacoustic gas sensor system. The microphone is fabricated using a novel process to enable DRIE etch through of membranes of ...