Blar i SINTEF Digital på tidsskrift "Journal of Applied Physics"
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Effect of the native oxide on the Surface Passivation of Si by Al2O3
(Peer reviewed; Journal article, 2021)The effect of the native silicon oxide layer on the passivation properties of Al2O3 on p-type Si surfaces has been investigated. This was done by comparing effective carrier lifetime, surface saturation current density, ... -
Electrochemically driven degradation of chemical solution deposited ferroelectric thin-films in humid ambient
(Peer reviewed; Journal article, 2020)The ambient humidity significantly accelerates the degradation of lead zirconate titanate (PZT) films in microelectromechanical systems; the cause of such degradation is under debate. Here, it is shown that the degradation ... -
Interfacial characterization of Al-Al thermocompression bonds
(Journal article; Peer reviewed, 2016)Interfaces formed by Al-Al thermocompression bonding were studied by the transmission electron microscopy. Si wafer pairs having patterned bonding frames were bonded using Al films deposited on Si or SiO2 as intermediate ...