Blar i SINTEF Digital på emneord "Bosch process"
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Metasurface Fabrication by Cryogenic and Bosch Deep Reactive Ion Etching
(Peer reviewed; Journal article, 2021)The research field of metasurfaces has attracted considerable attention in recent years due to its high potential to achieve flat, ultrathin optical devices of high performance. Metasurfaces, consisting of artificial ...