Blar i SINTEF Digital på forfatter "Bakke, Thor"
-
Optical MEMS filter for infrared gas detection
Bakke, Thor; Lacolle, Matthieu Jean P; Sagberg, Håkon; Johansen, Ib-Rune; Moe, Sigurd T. (Lecture, 2008)An optical filter is proposed, which can be adapted to infrared detection of various gases. The filter is based on a diffraction grating structured on a micro-electro-mechanical system (MEMS) which can be switched between ... -
TSV development for miniaturized MEMS acceleration switch
Lietaer, Nicolas; Summanwar, Anand; Bakke, Thor; Taklo, Maaike Margrete Visser; Dalsjø, Per G. (Chapter, 2011)Fragile micromachined MEMS structures are usually protected by bonding a capping wafer to the device wafer itself. As opposed to using lateral interconnects at the interface between the cap wafer and the device wafer, the ... -
TSV development for miniaturized MEMS acceleration switch
Lietaer, Nicolas; Summanwar, Anand; Dalsjø, Per G.; Bakke, Thor; Tofteberg, Hannah Rosquist (Lecture, 2010)Fragile micromachined MEMS structures are usually protected by bonding a capping wafer to the device wafer itself. As opposed to using lateral interconnects at the interface between the cap wafer and the device wafer, the ... -
Two-state Optical Filter Based on Micromechanical Diffractive Elements
Sagberg, Håkon; Bakke, Thor; Johansen, Ib-Rune; Lacolle, Matthieu Jean P; Moe, Sigurd T. (Chapter, 2007)We have designed a robust two-state filter for infrared gas measurement, where the filter transmittance alternates between a single bandpass function, and a double-band offset reference. The device consists of fixed and ... -
Vibration Sensor for Wireless Condition Monitoring
Bakke, Thor (Lecture, 2008)A microelectromechanical system (MEMS) accelerometerhas been manufactured for wireless vibrationmeasurements on AC motors for condition monitoring.The vibration sensor element has been encapsulated withglass using wafer ... -
Vibration Sensor for Wireless Condition Monitoring
Bakke, Thor (Lecture, 2008)A microelectromechanical system (MEMS) accelerometerhas been manufactured for wireless vibrationmeasurements on AC motors for condition monitoring.The vibration sensor element has been encapsulated withglass using wafer ... -
Wafer-level packaged MEMS switch with TSV
Lietaer, Nicolas; Bakke, Thor; Summanwar, Anand; Dalsjø, Per G.; Gakkestad, Jakob; Niklaus, Frank (Lecture, 2011)