Blar i SINTEF Open på forfatter "Eltes, F"
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Wafer level integration of epitaxial piezoelectric thin films for novel NEMS, MEMS and MOEMS applications
Dekkers, M; Nguyen, M; Hildebrand, N; Abel, S; Eltes, F; Fompeyrine, J; Wittendorp, Paul (Chapter, 2017)Pb(Zr, Ti)O3 (PZT) and (PhMg1/3Nb2/3O3)2/3-CPbTiO3)1/3 (PMN-PT) thin films are epitaxially deposited on 200 mm wafers using Solmates' Pulsed Laser Deposition (PLD) platform. Epitaxy is achieved using an optimized TiN ...