Browsing SINTEF Open by Author "Nilsen, Ola"
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Selective etching of nanostructured a-Si:Al and its effect on porosity, Al gradient and surface oxidation
Kjeldstad, Torunn; Thøgersen, Annett; Stange, Marit Synnøve Sæverud; Jensen, Ingvild Julie Thue; Nilsen, Ola; Galeckas, Augustinas; Monakhov, Eduard (Peer reviewed; Journal article, 2020)Nanoporous amorphous silicon (a-Si) with <5 nm cylindrical pores have been fabricated by phase separation of aluminum (Al) and silicon, forming self-assembled Al nanowires (NWs), followed by subsequent removal of Al by wet ...