Browsing SINTEF Open by Author "Avram, Andrei M."
Now showing items 1-1 of 1
-
UV-Nanoimprint and Deep Reactive Ion Etching of High Efficiency Silicon Metalenses: High Throughput at Low Cost with Excellent Resolution and Repeatability
Dirdal, Christopher Andrew; Milenko, Karolina Barbara; Summanwar, Anand; Dullo, Firehun Tsige; Thrane, Paul Conrad Vaagen; Rasoga, Oana; Avram, Andrei M.; Dinescu, Adrian; Baracu, Angela M. (Peer reviewed; Journal article, 2023)As metasurfaces begin to find industrial applications there is a need to develop scalable and cost-effective fabrication techniques which offer sub-100 nm resolution while providing high throughput and large area patterning. ...