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dc.contributor.authorVereshchagina, Elizaveta
dc.contributor.authorAndreassen, Erik
dc.contributor.authorBatalden, Jørn
dc.contributor.authorPlassen, Martin
dc.contributor.authorMielnik, Michal Marek
dc.date.accessioned2019-02-15T07:56:53Z
dc.date.available2019-02-15T07:56:53Z
dc.date.created2018-11-29T14:39:53Z
dc.date.issued2018
dc.identifier.citation2018 IEEE Micro Electro Mechanical Systems (MEMS), 2018, Belfast UK, 21-25 Jan. 2018nb_NO
dc.identifier.isbn978-1-5386-4783-7
dc.identifier.urihttp://hdl.handle.net/11250/2585581
dc.description.abstractTwo key issues in the manufacturing of microfluidic devices are to obtain low surface roughness, i.e. in the range of nanometers (to facilitate optical detection and controlled flow through microfluidic networks), and to achieve robust bonding. Here we report that a chemical polishing step, used for smoothening the surface of cyclo-olefin polymer (COP) components manufactured by micromilling, reduces the surface roughness (to Ra ∼ 150 nm) and facilitates a leak-tight COP-COP bond. We report new results on COP structuring and surface characterization by white light interferometry (WLI), infrared spectroscopy (FTIR-ATR), contact angle measurements and transmittance measurements, as well as demonstrations of a functional thermally bonded centrifugal microfluidic devicesnb_NO
dc.description.abstractSimultaneous improvement of surface finish and bonding of centrifugal microfluidic devices in cyclo-olefin polymersnb_NO
dc.language.isoengnb_NO
dc.relation.ispartof2018 IEEE Micro Electro Mechanical Systems (MEMS), 2018, Belfast UK, 21-25 Jan. 2018
dc.titleSimultaneous improvement of surface finish and bonding of centrifugal microfluidic devices in cyclo-olefin polymersnb_NO
dc.typeChapternb_NO
dc.description.versionacceptedVersionnb_NO
dc.source.pagenumber1257-1260nb_NO
dc.identifier.cristin1637041
cristin.unitcode7401,90,31,0
cristin.unitcode7401,80,64,0
cristin.unitcode7401,80,62,0
cristin.unitcode7401,80,40,0
cristin.unitnameMicrosystems and Nanotechnology
cristin.unitnameMaterialer og nanoteknologi
cristin.unitnameBærekraftig energiteknologi
cristin.unitnameProsessteknologi
cristin.ispublishedtrue
cristin.fulltextpostprint
cristin.qualitycode1


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