| dc.contributor.author | Vereshchagina, Elizaveta | |
| dc.contributor.author | Poppe, Erik Utne | |
| dc.contributor.author | Schjølberg-Henriksen, Kari | |
| dc.contributor.author | Wöhrmann, Markus | |
| dc.contributor.author | Moe, Sigurd T. | |
| dc.date.accessioned | 2019-01-22T07:43:51Z | |
| dc.date.available | 2019-01-22T07:43:51Z | |
| dc.date.created | 2019-01-16T10:25:08Z | |
| dc.date.issued | 2018 | |
| dc.identifier.citation | 2018 7th Electronic System-Integration Technology Conference (ESTC), Dresden, Germany, 18-21 Sept. 2018, pp 9 | nb_NO |
| dc.identifier.isbn | 978-1-5386-6814-6 | |
| dc.identifier.uri | http://hdl.handle.net/11250/2581675 | |
| dc.description.abstract | Thermo-mechanical stability of metal structures is one of the key factors affecting accuracy of micro-electromechanical (MEMS) piezoresistive pressure sensors. In this work, we present the measurement results of stress and hysteresis for the following metals deposited in the same sputtering equipment -Al, Ti, Al-Ti alloy and stacks of Al/Ti films-enabling, for the first time, a direct comparison between their thermo-mechanical properties supported with analysis of surface morphology (grain size, hillocks and voids). | nb_NO |
| dc.language.iso | eng | nb_NO |
| dc.relation.ispartof | 2018 7th Electronic System-Integration Technology Conference (ESTC), Dresden, Germany, 18-21 Sept. 2018 | |
| dc.title | Metal Films for MEMS Pressure Sensors: Comparison of Al, Ti, Al-Ti Alloy and Al/Ti Film Stacks | nb_NO |
| dc.type | Chapter | nb_NO |
| dc.description.version | acceptedVersion | nb_NO |
| dc.source.pagenumber | 9 | nb_NO |
| dc.identifier.cristin | 1657936 | |
| dc.relation.project | Norges forskningsråd: 247781 | nb_NO |
| cristin.unitcode | 7401,90,31,0 | |
| cristin.unitname | Microsystems and Nanotechnology | |
| cristin.ispublished | true | |
| cristin.fulltext | postprint | |
| cristin.qualitycode | 1 | |
