Metal Films for MEMS Pressure Sensors: Comparison of Al, Ti, Al-Ti Alloy and Al/Ti Film Stacks
Vereshchagina, Elizaveta; Poppe, Erik Utne; Schjølberg-Henriksen, Kari; Wöhrmann, Markus; Moe, Sigurd T.
Chapter
Accepted version
Permanent lenke
http://hdl.handle.net/11250/2581675Utgivelsesdato
2018Metadata
Vis full innførselSamlinger
- Publikasjoner fra CRIStin - SINTEF AS [5583]
- SINTEF Digital [2379]
Originalversjon
2018 7th Electronic System-Integration Technology Conference (ESTC), Dresden, Germany, 18-21 Sept. 2018, pp 9Sammendrag
Thermo-mechanical stability of metal structures is one of the key factors affecting accuracy of micro-electromechanical (MEMS) piezoresistive pressure sensors. In this work, we present the measurement results of stress and hysteresis for the following metals deposited in the same sputtering equipment -Al, Ti, Al-Ti alloy and stacks of Al/Ti films-enabling, for the first time, a direct comparison between their thermo-mechanical properties supported with analysis of surface morphology (grain size, hillocks and voids).