Metal Films for MEMS Pressure Sensors: Comparison of Al, Ti, Al-Ti Alloy and Al/Ti Film Stacks
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Original version2018 7th Electronic System-Integration Technology Conference (ESTC), Dresden, Germany, 18-21 Sept. 2018, pp 9
Thermo-mechanical stability of metal structures is one of the key factors affecting accuracy of micro-electromechanical (MEMS) piezoresistive pressure sensors. In this work, we present the measurement results of stress and hysteresis for the following metals deposited in the same sputtering equipment -Al, Ti, Al-Ti alloy and stacks of Al/Ti films-enabling, for the first time, a direct comparison between their thermo-mechanical properties supported with analysis of surface morphology (grain size, hillocks and voids).