dc.contributor.author | Clausen, Ingelin | |
dc.contributor.author | Moe, Sigurd T. | |
dc.contributor.author | Vogl, Andreas | |
dc.date.accessioned | 2017-02-20T14:17:14Z | |
dc.date.available | 2017-02-20T14:17:14Z | |
dc.date.created | 2017-02-16T14:17:50Z | |
dc.date.issued | 2011 | |
dc.identifier.citation | MME 2011: Proceedings of the 22nd Micromechanics and microsystems technology Europe workshop: 19-22 June 2011 Tønsberg, Norway | nb_NO |
dc.identifier.isbn | 978-82-7860-224-9 | |
dc.identifier.uri | http://hdl.handle.net/11250/2431457 | |
dc.description.abstract | In this paper cost-effective methods for fabrication of a piezoresistive cantilever sensor for industrial use are focused. The intended use of the presented cantilever is a medical application. A closer description of the cantilever design is given. The low-cost processing sequence is presented and each processing step is explained in detail. Results from electrical probing and mechanical strength test are given. The results demonstrate that the chosen low-cost processing route results in high yield and a mechanical robust device. | |
dc.language.iso | eng | nb_NO |
dc.relation.ispartof | MME 2011: Proceedings of the 22nd Micromechanics and microsystems technology Europe workshop: 19-22 June 2011 Tønsberg, Norway | |
dc.title | Cost-effective processing of a piezoresistive MEMS cantilever sensor | nb_NO |
dc.type | Chapter | nb_NO |
dc.source.pagenumber | 65-68 | nb_NO |
dc.identifier.cristin | 1451296 | |
cristin.unitcode | 7401,90,31,0 | |
cristin.unitname | Mikrosystemer og nanoteknologi | |
cristin.ispublished | true | |
cristin.fulltext | postprint | |