Wafer-level packaged MEMS switch with TSV

dc.contributor.author	Lietaer, Nicolas
dc.contributor.author	Bakke, Thor
dc.contributor.author	Summanwar, Anand
dc.contributor.author	Dalsjø, Per G.
dc.contributor.author	Gakkestad, Jakob
dc.contributor.author	Niklaus, Frank
dc.date.accessioned	2017-02-20T10:55:10Z
dc.date.available	2017-02-20T10:55:10Z
dc.date.created	2011-12-22T09:37:10Z
dc.date.issued	2011
dc.identifier.citation	International Wafer-Level Packaging Conference	nb_NO
dc.identifier.uri	http://hdl.handle.net/11250/2431338
dc.language.iso	eng	nb_NO
dc.title	Wafer-level packaged MEMS switch with TSV	nb_NO
dc.type	Lecture	nb_NO
dc.identifier.cristin	871935
cristin.unitcode	7401,90,31,0
cristin.unitname	Mikrosystemer og nanoteknologi
cristin.ispublished	true
cristin.fulltext	postprint