dc.contributor.author | Haugholt, Karl Henrik | |
dc.date.accessioned | 2017-02-13T12:28:50Z | |
dc.date.available | 2017-02-13T12:28:50Z | |
dc.date.created | 2015-09-24T20:05:44Z | |
dc.date.issued | 2009 | |
dc.identifier.citation | Optical Measurement Systems for Industrial Inspection VI | nb_NO |
dc.identifier.isbn | 9780819476722 | |
dc.identifier.uri | http://hdl.handle.net/11250/2430491 | |
dc.description.abstract | The paper presents the optical, mechanical, and electro-optical design of an interferometric inspection system for massive parallel inspection of MicroElectroMechanicalSystems (MEMS) and MicroOptoElectroMechanicalSystems (MOEMS). The basic idea is to adapt a micro-optical probing wafer to the M(O)EMS wafer under test. The probing wafer is exchangeable and contains a micro-optical interferometer array. A low coherent and a laser interferometer array are developed. Two preliminary interferometer designs are presented; a low coherent interferometer array based on a Mirau configuration and a laser interferometer array based on a Twyman-Green configuration. The optical design focuses on the illumination and imaging concept for the interferometer array. The mechanical design concentrates on the scanning system and the integration in a standard test station for micro-fabrication. Models of single channel low coherence and laser interferometers and preliminary measurement results are presented. The smart-pixel approach for massive parallel electro-optical detection and data reduction is discussed. | |
dc.description.abstract | Optical, mechanical and electro-optical design of an interferometric test station for massive parallel inspection of MEMS and MOEMS | |
dc.language.iso | eng | nb_NO |
dc.relation.ispartof | Optical Measurement Systems for Industrial Inspection VI | |
dc.title | Optical, mechanical and electro-optical design of an interferometric test station for massive parallel inspection of MEMS and MOEMS | nb_NO |
dc.type | Chapter | nb_NO |
dc.identifier.cristin | 1271787 | |
cristin.unitcode | 7401,90,41,0 | |
cristin.unitname | Optiske målesystemer og dataanalyse | |
cristin.ispublished | true | |
cristin.fulltext | postprint | |
cristin.qualitycode | 1 | |