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dc.contributor.authorHaugholt, Karl Henrik
dc.date.accessioned2017-02-13T12:28:50Z
dc.date.available2017-02-13T12:28:50Z
dc.date.created2015-09-24T20:05:44Z
dc.date.issued2009
dc.identifier.citationOptical Measurement Systems for Industrial Inspection VInb_NO
dc.identifier.isbn9780819476722
dc.identifier.urihttp://hdl.handle.net/11250/2430491
dc.description.abstractThe paper presents the optical, mechanical, and electro-optical design of an interferometric inspection system for massive parallel inspection of MicroElectroMechanicalSystems (MEMS) and MicroOptoElectroMechanicalSystems (MOEMS). The basic idea is to adapt a micro-optical probing wafer to the M(O)EMS wafer under test. The probing wafer is exchangeable and contains a micro-optical interferometer array. A low coherent and a laser interferometer array are developed. Two preliminary interferometer designs are presented; a low coherent interferometer array based on a Mirau configuration and a laser interferometer array based on a Twyman-Green configuration. The optical design focuses on the illumination and imaging concept for the interferometer array. The mechanical design concentrates on the scanning system and the integration in a standard test station for micro-fabrication. Models of single channel low coherence and laser interferometers and preliminary measurement results are presented. The smart-pixel approach for massive parallel electro-optical detection and data reduction is discussed.
dc.description.abstractOptical, mechanical and electro-optical design of an interferometric test station for massive parallel inspection of MEMS and MOEMS
dc.language.isoengnb_NO
dc.relation.ispartofOptical Measurement Systems for Industrial Inspection VI
dc.titleOptical, mechanical and electro-optical design of an interferometric test station for massive parallel inspection of MEMS and MOEMSnb_NO
dc.typeChapternb_NO
dc.identifier.cristin1271787
cristin.unitcode7401,90,41,0
cristin.unitnameOptiske målesystemer og dataanalyse
cristin.ispublishedtrue
cristin.fulltextpostprint
cristin.qualitycode1


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