3D stacked MEMS and ICs in a miniaturized sensor node
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Date
2009Metadata
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- Publikasjoner fra CRIStin - SINTEF AS [5638]
- SINTEF Digital [2381]
Abstract
Solutions for through silicon viasSolutions for interconnectsDemonstrator for e-CUBES 3D stacked MEMS and ICs in a miniaturized sensor node