Browsing Publikasjoner fra CRIStin - SINTEF AS by Journals "IEEE Nuclear Science Symposium Conference Record"

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    • High aspect ratio deep RIE for novel 3D radiation sensors in high energy physics applications 

      Kok, Angela; Hansen, Thor-Erik; Hansen, Trond Andreas; Jensen, Geir Uri; Lietaer, Nicolas; Mielnik, Michal Marek; Storås, Preben (Journal article; Peer reviewed, 2009)
      3D detectors with electrodes penetrating through the entire silicon substrate have many advantages over conventional planar silicon technology, for example, high radiation tolerance. High aspect ratio through-wafer holes ...