Blar i Publikasjoner fra CRIStin på emneord "EBL patterning"

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    • Silicon Metalens Fabrication from Electron Beam to UV-Nanoimprint Lithography 

      Baracu, Angela; Avram, Marius Andrei; Breazu, Carmen; Bunea, Mihaela-Cristina; Socol, Marcela; Stanculescu, Anca; Matei, Elena; Thrane, Paul Conrad Vaagen; Dirdal, Christopher Andrew; Dinescu, Adrian; Rasoga, Oana (Peer reviewed; Journal article, 2021)
      This study presents the design and manufacture of metasurface lenses optimized for focusing light with 1.55 µm wavelength. The lenses are fabricated on silicon substrates using electron beam lithography, ultraviolet-nanoimprint ...