Browsing Publikasjoner fra CRIStin by Journals "Photonics Letters of Poland"
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An interferometric test station for massive parallel inspection of MEMS and MOEMS
(Journal article; Peer reviewed, 2009)The paper presents the optical, mechanical, and electro-optical design of an interferometric inspection system for massive parallel inspection of Micro(Opto)ElectroMechanicalSystems (M(O)EMS). The basic idea is to adapt a ...