• 2nd run of full 3-D detectors 

      Hansen, Thor-Erik; Kok, Angela; Hansen, Trond Andreas; Lietaer, Nicolas; Jensen, Geir Uri; Summanwar, Anand (Lecture, 2009)
    • 3D Radiation Detectors: Charge Collection Characterisation and Applicability of Technology for Microdosimetry 

      Tran, Linh T.; Prokopovich, Dale A.; Petasecca, Marco; Lerch, Michael L.F.; Kok, Angela; Summanwar, Anand; Hansen, Thor-Erik; Da Via, Cinzia; Reinhard, Mark I.; Rosenfeld, Anatoly B. (Journal article; Peer reviewed, 2014)
      A study of charge collection in SINTEF 3D active edge silicon detectors was carried out at ANSTO using Ion Beam InducedCharge (IBIC) technique.An IBIC study has shown that several different geometries of 3D detectors have ...
    • Design, Simulation, Fabrication, and Preliminary Tests of 3D CMS Pixel Detectors for the Super-LHC 

      Koybasi, Ozhan; Bortoletto, Daniela; Hansen, Thor-Erik; Kok, Angela; Hansen, Trond Andreas; Lietaer, Nicolas; Jensen, Geir Uri; Summanwar, Anand; Bolla, Gino; Kwan, Simon Wing Lok (Journal article; Peer reviewed, 2010)
    • Development and fabrication of full 3D-sensors at SINTEF MiNaLab 

      Hansen, Thor-Erik; Kok, Angela; Hansen, Trond Andreas; Lietaer, Nicolas; Jensen, Geir Uri; Summanwar, Anand (Lecture, 2009)
    • Etching buried oxide at the bottom of high aspect ratio structures 

      Summanwar, Anand; Lietaer, Nicolas (Lecture, 2011)
      Plasma based dry etching is a key process widely used in micro-fabrication today. In this article, we look at the challenges involved in the anisotropic etching of buried SiO2 layers at the bottom of high aspect ratio ...
    • Etching Burried Oxide at the Bottom of High Aspect Ratio Structures 

      Summanwar, Anand; Lietaer, Nicolas (Chapter, 2011)
      Plasma based dry etching is a key process widely used in micro-fabrication today. In this article, we look at the challenges involved in the anisotropic etching of buried SiO2 layers at the bottom of high aspect ratio ...
    • High Performance Predictable Quantum Efficient Detector Based on Induced-Junction Photodiodes Passivated with SiO2/SiNx 

      Koybasi, Ozhan; Nordseth, Ørnulf; Tran, Trinh; Povoli, Marco; Rajteri, Mauro; Pepe, Carlo; Bardalen, Eivind; Manoocheri, Farshid; Summanwar, Anand; Korpusenko, Mikhail; Getz, Michael Norderhaug; Ohlckers, Per; Ikonen, Erkki; Gran, Jarle (Peer reviewed; Journal article, 2021)
      We performed a systematic study involving simulation and experimental techniques to develop induced-junction silicon photodetectors passivated with thermally grown SiO2 and plasma-enhanced chemical vapor deposited (PECVD) ...
    • In-field and out-of-file application in 12C ion therapy using fully 3D silicon microdosimeters 

      Tran, Linh T.; Chartier, Lachlan; Bolst, David; Davis, Jeremy; Prokopovich, Dale A.; Pogossov, Alex; Guatelli, Susanna; Reinhard, Mark I.; Petasecca, Marco; Lerch, Michael L.F.; Matsufuji, Naruhiro; Povoli, Marco; Summanwar, Anand; Kok, Angela; Jackson, Michael; Rosenfeld, Anatoly B. (Journal article; Peer reviewed, 2018)
      This paper presents recent development of Silicon on Insulator (SOI) detectors for microdosimetry at the Centre for Medical Radiation Physics (CMRP) at the University of Wollongong. A new CMRP SOI microdosimeter design, ...
    • Latest Results From 2nd SINTEF 3D-Run 

      Hansen, Thor-Erik; Kok, Angela; Hansen, Trond Andreas; Lietaer, Nicolas; Jensen, Geir Uri; Summanwar, Anand (Lecture, 2009)
    • MEMS-tunable dielectric metasurface lens using thin-film PZT for large displacements at low voltages 

      Dirdal, Christopher Andrew; Thrane, Paul Conrad Vaagen; Dullo, Firehun Tsige; Gjessing, Jo; Summanwar, Anand; Tschudi, Jon (Peer reviewed; Journal article, 2022)
      Tunable focusing is a desired property in a wide range of optical imaging and sensing technologies but has tended to require bulky components that cannot be integrated on-chip and have slow actuation speeds. Recently, ...
    • Microdosimetry with a 3D silicon on insulator (SOI) detector in a low energy proton beamline 

      Samnøy, Andreas Tefre; Ytre-Hauge, Kristian; Malinen, Eirik; Tran, Linh; Rosenfeld, Anatoly; Povoli, Marco; Kok, Angela Chun Ying; Summanwar, Anand; Røhrich, Dieter (Peer reviewed; Journal article, 2020)
      An accurate description of the radiation quality of proton beams is a precondition to increase our understanding of radiobiological mechanisms and to develop accurate biological response models for radiotherapy. However, ...
    • Thin Silicon Microdosimeter utilizing 3D MEMS Fabrication Technology: Charge Collection Study and its application in mixed radiation fields 

      Tran, Linh T.; Chartier, Lachlan; Prokopovich, Dale A.; Bolst, David; Povoli, Marco; Summanwar, Anand; Kok, Angela; Pogossov, A.; Petasecca, Marco; Guatelli, S.; Reinhard, Mark I.; Lerch, Michael; Nancarrow, Mitchell; Matsufuji, Naruhiro; Jackson, Michael; Rosenfeld, Anatoly B. (Journal article; Peer reviewed, 2017)
      New 10-μm-thick silicon microdosimeters utilizing 3-D technology have been developed and investigated in this paper. The TCAD simulations were carried out to understand the electrical properties of the microdosimeters’ ...
    • TSV development for miniaturized MEMS acceleration switch 

      Lietaer, Nicolas; Summanwar, Anand; Bakke, Thor; Taklo, Maaike Margrete Visser; Dalsjø, Per G. (Chapter, 2011)
      Fragile micromachined MEMS structures are usually protected by bonding a capping wafer to the device wafer itself. As opposed to using lateral interconnects at the interface between the cap wafer and the device wafer, the ...
    • TSV development for miniaturized MEMS acceleration switch 

      Lietaer, Nicolas; Summanwar, Anand; Dalsjø, Per G.; Bakke, Thor; Tofteberg, Hannah Rosquist (Lecture, 2010)
      Fragile micromachined MEMS structures are usually protected by bonding a capping wafer to the device wafer itself. As opposed to using lateral interconnects at the interface between the cap wafer and the device wafer, the ...
    • Validation of Geant4 for silicon microdosimetry in heavy ion therapy 

      Bolst, David; Gautelli, Susanna; Tran, Linh T.; Davis, Jeremy; Chartier, Lachlan; Prokopovich, Dale A.; Pogossov, Alex; Reinhard, Mark I.; Petasecca, Marco; Lerch, Michael L.F.; Matsufuji, Naruhiro; Povoli, Marco; Kok, Angela; Summanwar, Anand; Jackson, Michael; Rosenfeld, Anatoly B. (Journal article; Peer reviewed, 2019)
      Microdosimetry is a particularly powerful method to estimate the relative biological effectiveness (RBE) of any mixed radiation field. This is particularly convenient for therapeutic heavy ion therapy (HIT) beams, referring ...
    • Wafer-level packaged MEMS switch with TSV 

      Lietaer, Nicolas; Bakke, Thor; Summanwar, Anand; Dalsjø, Per G.; Gakkestad, Jakob; Niklaus, Frank (Lecture, 2011)