• Electrical Characterization and Preliminary Beam Test Results of 3D Silicon CMS Pixel Detectors 

      Koybasi, Ozhan; Alagoz, Enver; Krzywda, Alex; Arndt, Kirk; Bolla, Gina; Bortoletto, Daniela; Hansen, Thor-Erik; Hansen, Trond Andreas; Jensen, Geir Uri; Kok, Angela Chun Ying; Kwan, Simon; Lietaer, Nicolas; Rivera, Ryan; Shipsey, Ian; Uplegger, Lorenzo; Da Via, Cinzia (Journal article; Peer reviewed, 2011)
      The fabrication of 3D detectors which requires bulk micromachining of columnar electrodes has been realized with advancements in MEMS technology. Since the fabrication of the first 3D prototype in Stanford Nanofabrication ...