Browsing SINTEF Open by Author "Jensen, Geir Uri"
Now showing items 1-12 of 12
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2nd run of full 3-D detectors
Hansen, Thor-Erik; Kok, Angela; Hansen, Trond Andreas; Lietaer, Nicolas; Jensen, Geir Uri; Summanwar, Anand (Lecture, 2009) -
A Clover shaped silicon piezoresistive microphone for miniaturized photoacoustic gas sensors
Grinde, Christopher; Øhlckers, Per; Mielnik, M.; Jensen, Geir Uri; Wang, DT (Chapter, 2009)Here we present the design and modeling of a novel piezoresistive microphone designed for a photoacoustic gas sensor system. The microphone is fabricated using a novel process to enable DRIE etch through of membranes of ... -
Biocompatible bonding of a rigid off-stoichiometry thiol-ene-epoxy polymer microfluidic cartridge to a biofunctionalized silicon biosensor
Sønstevold, Linda; Yadav, Mukesh; Arnfinnsdottir, Nina Bjørk; Herbjørnrød, Aina Kristin; Jensen, Geir Uri; Aksnes, Astrid; Mielnik, Michal Marek (Peer reviewed; Journal article, 2022)Attachment of biorecognition molecules prior to microfluidic packaging is advantageous for many silicon biosensor-based lab-on-a-chip (LOC) devices. This necessitates biocompatible bonding of the microfluidic cartridge, ... -
Design, Simulation, Fabrication, and Preliminary Tests of 3D CMS Pixel Detectors for the Super-LHC
Koybasi, Ozhan; Bortoletto, Daniela; Hansen, Thor-Erik; Kok, Angela; Hansen, Trond Andreas; Lietaer, Nicolas; Jensen, Geir Uri; Summanwar, Anand; Bolla, Gino; Kwan, Simon Wing Lok (Journal article; Peer reviewed, 2010) -
Development and fabrication of full 3D-sensors at SINTEF MiNaLab
Hansen, Thor-Erik; Kok, Angela; Hansen, Trond Andreas; Lietaer, Nicolas; Jensen, Geir Uri; Summanwar, Anand (Lecture, 2009) -
Electrical Characterization and Preliminary Beam Test Results of 3D Silicon CMS Pixel Detectors
Koybasi, Ozhan; Alagoz, Enver; Krzywda, Alex; Arndt, Kirk; Bolla, Gina; Bortoletto, Daniela; Hansen, Thor-Erik; Hansen, Trond Andreas; Jensen, Geir Uri; Kok, Angela Chun Ying; Kwan, Simon; Lietaer, Nicolas; Rivera, Ryan; Shipsey, Ian; Uplegger, Lorenzo; Da Via, Cinzia (Journal article; Peer reviewed, 2011)The fabrication of 3D detectors which requires bulk micromachining of columnar electrodes has been realized with advancements in MEMS technology. Since the fabrication of the first 3D prototype in Stanford Nanofabrication ... -
High aspect ratio deep RIE for novel 3D radiation sensors in high energy physics applications
Kok, Angela; Hansen, Thor-Erik; Hansen, Trond Andreas; Jensen, Geir Uri; Lietaer, Nicolas; Mielnik, Michal Marek; Storås, Preben (Journal article; Peer reviewed, 2009)3D detectors with electrodes penetrating through the entire silicon substrate have many advantages over conventional planar silicon technology, for example, high radiation tolerance. High aspect ratio through-wafer holes ... -
Latest Results From 2nd SINTEF 3D-Run
Hansen, Thor-Erik; Kok, Angela; Hansen, Trond Andreas; Lietaer, Nicolas; Jensen, Geir Uri; Summanwar, Anand (Lecture, 2009) -
Metasurface Fabrication by Cryogenic and Bosch Deep Reactive Ion Etching
Baracu, Angela; Dirdal, Christopher Andrew; Avram, Andrei; Dinescu, Adrian; Muller, Raluca; Jensen, Geir Uri; Thrane, Paul Conrad Vaagen; Angelskår, Hallvard (Peer reviewed; Journal article, 2021)The research field of metasurfaces has attracted considerable attention in recent years due to its high potential to achieve flat, ultrathin optical devices of high performance. Metasurfaces, consisting of artificial ... -
Next lot of 3-D detectors at SINTEF
Hansen, Thor-Erik; Kok, Angela; Hansen, Trond Andreas; Lietaer, Nicolas; Mielnik, Michal Marek; storås, Preben; Jensen, Geir Uri (Lecture, 2009) -
Plastic Deformation of Thin Si Membranes in Si-Si Direct Bonding
Poppe, Erik Utne; Jensen, Geir Uri; Moe, Sigurd T.; Wang, Dag Thorstein (Journal article; Peer reviewed, 2016)The effect of bond anneal in Si-Si direct bonding of laminates With thin membranes suspending closed cavities is studied. For membranes of a certain size and thickness, it is found that the under-pressure in the cavity ... -
Towards high-throughput large-area metalens fabrication using UV-nanoimprint lithography and Bosch deep reactive ion etching
Dirdal, Christopher Andrew; Jensen, Geir Uri; Angelskår, Hallvard; Thrane, Paul Conrad Vaagen; Gjessing, Jo; Ordnung, Daniel Alfred (Peer reviewed; Journal article, 2020)We demonstrate the fabrication of diffraction-limited dielectric metasurface lenses for NIR by the use of standard industrial high-throughput silicon processing techniques: UV nano imprint lithography (UV-NIL) combined ...