• Optical MEMS filter for infrared gas detection 

      Bakke, Thor; Lacolle, Matthieu Jean P; Sagberg, Håkon; Johansen, Ib-Rune; Moe, Sigurd T. (Lecture, 2008)
      An optical filter is proposed, which can be adapted to infrared detection of various gases. The filter is based on a diffraction grating structured on a micro-electro-mechanical system (MEMS) which can be switched between ...
    • TSV development for miniaturized MEMS acceleration switch 

      Lietaer, Nicolas; Summanwar, Anand; Dalsjø, Per G.; Bakke, Thor; Tofteberg, Hannah Rosquist (Lecture, 2010)
      Fragile micromachined MEMS structures are usually protected by bonding a capping wafer to the device wafer itself. As opposed to using lateral interconnects at the interface between the cap wafer and the device wafer, the ...
    • TSV development for miniaturized MEMS acceleration switch 

      Lietaer, Nicolas; Summanwar, Anand; Bakke, Thor; Taklo, Maaike Margrete Visser; Dalsjø, Per G. (Chapter, 2011)
      Fragile micromachined MEMS structures are usually protected by bonding a capping wafer to the device wafer itself. As opposed to using lateral interconnects at the interface between the cap wafer and the device wafer, the ...
    • Two-state Optical Filter Based on Micromechanical Diffractive Elements 

      Sagberg, Håkon; Bakke, Thor; Johansen, Ib-Rune; Lacolle, Matthieu Jean P; Moe, Sigurd T. (Chapter, 2007)
      We have designed a robust two-state filter for infrared gas measurement, where the filter transmittance alternates between a single bandpass function, and a double-band offset reference. The device consists of fixed and ...
    • Vibration Sensor for Wireless Condition Monitoring 

      Bakke, Thor (Lecture, 2008)
      A microelectromechanical system (MEMS) accelerometerhas been manufactured for wireless vibrationmeasurements on AC motors for condition monitoring.The vibration sensor element has been encapsulated withglass using wafer ...
    • Vibration Sensor for Wireless Condition Monitoring 

      Bakke, Thor (Lecture, 2008)
      A microelectromechanical system (MEMS) accelerometerhas been manufactured for wireless vibrationmeasurements on AC motors for condition monitoring.The vibration sensor element has been encapsulated withglass using wafer ...
    • Wafer-level packaged MEMS switch with TSV 

      Lietaer, Nicolas; Bakke, Thor; Summanwar, Anand; Dalsjø, Per G.; Gakkestad, Jakob; Niklaus, Frank (Lecture, 2011)