dc.contributor.author | Lacolle, Matthieu Jean P | |
dc.contributor.author | Johansen, Ib-Rune | |
dc.contributor.author | Wang, Dag Thorstein | |
dc.contributor.author | Moe, Sigurd T. | |
dc.contributor.author | Sagberg, Håkon | |
dc.contributor.author | Clausen, Sigmund | |
dc.contributor.author | Karlsson, Arne | |
dc.contributor.author | Akporiaye, Duncan | |
dc.date.accessioned | 2017-02-21T08:27:14Z | |
dc.date.available | 2017-02-21T08:27:14Z | |
dc.date.created | 2012-06-26T08:53:25Z | |
dc.date.issued | 2012 | |
dc.identifier.citation | Journal of Micromechanics and Microengineering. 2012, 22 (7), . | nb_NO |
dc.identifier.issn | 0960-1317 | |
dc.identifier.uri | http://hdl.handle.net/11250/2431534 | |
dc.description.abstract | We present the fabrication and demonstration of a two-dimensional array of scales micromachined in silicon. Each scale consists of a platform suspended by a spring. The mass present on the platform of each scale is measured from a distance by a camera, which is imaging the fringe pattern that arises from optical interference in an air gap under each scale. A diffractive lens at the bottom of the gap separates the fringe signal from unwanted reflections and directs the fringe signal towards the camera. When a mass deflects a scale platform downwards, the gap narrows at the scale centre and the fringe pattern gets tighter. Operation at temperatures as high as 700 °C was demonstrated, which makes the presented device useful for the monitoring of high-temperature chemical processes. | |
dc.language.iso | eng | nb_NO |
dc.title | Fabrication of an array of silicon microscales for the monitoring of chemical processes | nb_NO |
dc.type | Journal article | nb_NO |
dc.type | Peer reviewed | nb_NO |
dc.source.pagenumber | 7 | nb_NO |
dc.source.volume | 22 | nb_NO |
dc.source.journal | Journal of Micromechanics and Microengineering | nb_NO |
dc.source.issue | 7 | nb_NO |
dc.identifier.doi | 10.1088/0960-1317/22/7/074003 | |
dc.identifier.cristin | 931530 | |
cristin.unitcode | 7401,90,31,0 | |
cristin.unitcode | 7401,90,41,0 | |
cristin.unitcode | 7401,80,5,4 | |
cristin.unitcode | 7401,80,0,1 | |
cristin.unitname | Mikrosystemer og nanoteknologi | |
cristin.unitname | Optiske målesystemer og dataanalyse | |
cristin.unitname | Prosessintensivering og katalyse | |
cristin.unitname | Administrasjon | |
cristin.ispublished | true | |
cristin.fulltext | postprint | |
cristin.qualitycode | 1 | |